Thermogravimetric Analysis of Evolved Gases (TDS)
By using infrared heating, it is possible to heat only the sample, allowing for a lower background!
We would like to introduce our "Thermal Desorption Gas Analysis (TDS)." By understanding the gases emitted from materials and components, it is possible to confirm surface contaminants, verify process improvement measures, and estimate the causes of defects. In Thermal Desorption Gas Analysis (TDS), when the sample is heated in a vacuum, we can identify the types of gases emitted from the surface and interior (qualitative analysis) and perform semi-quantitative analysis of the gas volume. 【Features】 ■ Sample size: Up to 10mm x 10mm and 4mm (thickness) ■ Sample heating atmosphere: High vacuum (10^-7 Pa) ■ Temperature - Room temperature to 1,400℃ (sample stage temperature) - Room temperature to approximately 1,150℃ (Si substrate calibration temperature*) * High-precision temperature correction is performed using embedded thermocouples. * For more details, please download the PDF or feel free to contact us.
- Company：東芝ナノアナリシス
- Price：Other
